Determination of XUV Optical Constants by Reflectometry Using a High-Repetition Rate 46.9-nm Laser

نویسندگان

  • I. A. Artioukov
  • B. R. Benware
  • J. J. Rocca
  • A. V. Vinogradov
چکیده

We report the measurement of the optical constants of Si, GaP, InP, GaAs, GaAsP, and Ir at a wavelength of 46.9 nm (26.5 eV). The optical constants were obtained from the measurement of the variation of the reflectivity as a function of angle utilizing, as an illumination source, a discharge pumped 46.9nm table-top laser operated at a repetition rate of 1 Hz. These measurements constitute the first application of an ultrashort wavelength laser to materials research.

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تاریخ انتشار 2000